Characterization of Capacitive Comb-finger MEMS Accelerometers

Aaditi Joshi, Sangram Redkar, Thomas Sugar

Abstract


This paper discusses various methods for testing the performance of MEMS capacitive comb-finger accelerometers manufactured by Sandia National Laboratories. The use of Capacitive MEMS devices requires complex circuits for measurement of capacitance. Sandia MEMS accelerometer’s capacitance changes in a very small femto-farad (fF) range. The performance of accelerometer is tested using Analog Devices AD7747 sigma-delta capacitance to digital converter. The response of a MEMS capacitive accelerometer to various tests is useful for testing and characterization and investigate it’s suitability for various applications


Keywords


MEMS Capacitive Acclerometers

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DOI: https://doi.org/10.11591/eei.v4i4.546

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Bulletin of EEI Statistics

Bulletin of Electrical Engineering and Informatics (BEEI)
ISSN: 2089-3191 , e-ISSN: 2302-9285
This journal is published by the Institute of Advanced Engineering and Science (IAES) .